- linewidth scaling
- Микроэлектроника: уменьшение ширины линии
Универсальный англо-русский словарь. Академик.ру. 2011.
Универсальный англо-русский словарь. Академик.ру. 2011.
Nondimensionalization — is the partial or full removal of units from an equation involving physical quantities by a suitable substitution of variables. This technique can simplify and parameterize problems where measured units are involved. It is closely related to… … Wikipedia
Optical heterodyne detection — is an important special case of heterodyne detection. In heterodyne detection, a signal of interest at some frequency is non linearly mixed with a reference local oscillator (LO) that is set at a close by frequency. The desired outcome is the… … Wikipedia
Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of … Wikipedia